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通过氢蚀刻揭示化学气相沉积冷却过程中石墨烯畴的边缘形态演变。

Edge morphology evolution of graphene domains during chemical vapor deposition cooling revealed through hydrogen etching.

作者信息

Zhang Haoran, Zhang Yanhui, Zhang Yaqian, Chen Zhiying, Sui Yanping, Ge Xiaoming, Yu Guanghui, Jin Zhi, Liu Xinyu

机构信息

State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.

Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, 3 West Beitucheng Road, Beijing 100029, China.

出版信息

Nanoscale. 2016 Feb 21;8(7):4145-50. doi: 10.1039/c5nr06624g.

Abstract

During cooling, considerable changes such as wrinkle formation and edge passivation occur in graphene synthesized on the Cu substrate. Wrinkle formation is caused by the difference in the thermal expansion coefficients of graphene and its substrate. This work emphasizes the cooling-induced edge passivation. The graphene-edge passivation can limit the regrowth of graphene at the domain edge. Our work shows that silicon-containing particles tend to accumulate at the graphene edge, and the formation of these particles is related to cooling. Furthermore, a clear curvature can be observed at the graphene edge on the Cu substrate, indicating the sinking of the graphene edge into the Cu substrate. Both the sinking of the graphene edge and the accumulation of silicon-containing particles are responsible for edge passivation. In addition, two kinds of graphene edge morphologies are observed after etching, which were explained by different etching mechanisms that illustrate the changes of the graphene edge during cooling.

摘要

在冷却过程中,在铜衬底上合成的石墨烯会发生诸如褶皱形成和边缘钝化等显著变化。褶皱的形成是由石墨烯与其衬底的热膨胀系数差异引起的。这项工作强调了冷却诱导的边缘钝化。石墨烯边缘钝化可以限制石墨烯在畴边缘的再生长。我们的工作表明,含硅颗粒倾向于在石墨烯边缘积累,并且这些颗粒的形成与冷却有关。此外,在铜衬底上的石墨烯边缘可以观察到明显的曲率,这表明石墨烯边缘沉入了铜衬底。石墨烯边缘的下沉和含硅颗粒的积累都导致了边缘钝化。此外,蚀刻后观察到两种石墨烯边缘形态,这可以通过不同的蚀刻机制来解释,这些机制说明了冷却过程中石墨烯边缘的变化。

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