Liu Longju, Zhang Jingxiang, Badshah Mohsin Ali, Dong Liang, Li Jingjing, Kim Seok-min, Lu Meng
Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa 50011, USA.
School of Mechanical Engineering, Chung-Ang University, Seoul 156-756, Republic of Korea.
Sci Rep. 2016 Mar 1;6:22445. doi: 10.1038/srep22445.
The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a single mold. The process utilizes a stretchable mold to produce the desired periodic structure in a photopolymer on glass or plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which resides on the surface of the mold. Direction and magnitude of the force determine the array geometry, including the lattice constant and arrangement. By stretching the mold, 2D arrays with square, rectangular, and triangular lattice structures can be fabricated. As one example, we present a plasmonic crystal device with surface plasmon resonances determined by the force applied during molding. In addition, photonic crystal slabs with different array patterns are fabricated and characterized. This unique process offers the capability of generating various periodic nanostructures rapidly and inexpensively.
制造具有亚波长特征的周期性结构的能力在集成光学、光学传感器和光伏器件方面具有巨大的潜在影响。在此，我们报告一种可编程的纳米复制成型工艺，该工艺使用单个模具制造各种亚微米级周期性图案。该工艺利用可拉伸模具在玻璃或塑料基板上的光聚合物中产生所需的周期性结构。在复制成型过程中，单轴力施加到模具上并导致位于模具表面的周期性结构发生变化。力的方向和大小决定了阵列几何形状，包括晶格常数和排列方式。通过拉伸模具，可以制造具有正方形、矩形和三角形晶格结构的二维阵列。作为一个例子，我们展示了一种等离子体晶体器件，其表面等离子体共振由成型过程中施加的力决定。此外，还制造并表征了具有不同阵列图案的光子晶体平板。这种独特的工艺能够快速且廉价地生成各种周期性纳米结构。
