Fang Feiyu, Tao Xulei, Chen Xun, Wang Han, Wu Peixuan, Zhang Jiarong, Zeng Jun, Zhu Zimin, Liu Zhen
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.
Micromachines (Basel). 2020 Feb 3;11(2):161. doi: 10.3390/mi11020161.
In this paper, we synergistically combine electrohydrodynamic (EHD) printing and replica molding for the fabrication of microlenses. Glycerol solution microdroplets was sprayed onto the ITO glass to form liquid mold by an EHD printing process. The liquid mold is used as a master to fabricate a polydimethylsiloxane (PDMS) mold. Finally, the desired micro-optical device can be fabricated on any substrate using a PDMS soft lithography mold. We demonstrate our strategy by generating microlenses of photocurable polymers and by characterizing their optical properties. It is a new method to rapidly and cost-effectively fabricate molds with small diameters by exploiting the advantages of EHD printing, while maintaining the parallel nature of soft-lithography.
在本文中，我们将电流体动力学（EHD）打印与复制成型协同结合用于微透镜的制造。通过EHD打印工艺将甘油溶液微滴喷涂到ITO玻璃上以形成液体模具。该液体模具用作母模来制造聚二甲基硅氧烷（PDMS）模具。最后，使用PDMS软光刻模具可以在任何基板上制造所需的微光学器件。我们通过生成光固化聚合物微透镜并表征其光学特性来展示我们的策略。这是一种利用EHD打印的优势，同时保持软光刻的平行特性，快速且经济高效地制造小直径模具的新方法。
