Yordanov D, Lishev St, Shivarova A
Faculty of Physics, Sofia University, BG-1164 Sofia, Bulgaria.
Rev Sci Instrum. 2016 Feb;87(2):02B116. doi: 10.1063/1.4933013.
Combining measurements of the extracted currents with probe and laser-photodetachment diagnostics, the study is an extension of recent tests of factors and gas-discharge conditions stimulating the extraction of volume produced negative ions. The experiment is in a single element of a rf source with the design of a matrix of small-radius inductively driven discharges. The results are for the electron and negative-ion densities, for the plasma potential and for the electronegativity in the vicinity of the plasma electrode as well as for the currents of the extracted negative ions and electrons. The plasma-electrode bias and the rf power have been varied. Necessity of a high bias to the plasma electrode and stable linear increase of the extracted currents with the rf power are the main conclusions.
通过将提取电流的测量结果与探针和激光光致脱附诊断相结合，该研究是对近期有关刺激体产生负离子提取的因素和气体放电条件测试的扩展。实验在射频源的单个单元中进行，该单元设计为小半径感应驱动放电矩阵。结果包括等离子体电极附近的电子和负离子密度、等离子体电位、电负性，以及提取的负离子和电子的电流。已改变等离子体电极偏压和射频功率。主要结论是需要对等离子体电极施加高偏压，并且提取电流随射频功率呈稳定线性增加。
