Lishev St, Shivarova A, Yordanov D
Faculty of Physics, Sofia University, BG-1164 Sofia, Bulgaria.
Rev Sci Instrum. 2016 Feb;87(2):02B115. doi: 10.1063/1.4932986.
A single element of a matrix source of negative hydrogen ions (a planar-coil inductively driven small-radius discharge equipped with an extraction system) is studied regarding the ion extraction. Since the spatial distribution of the negative ions obeys that of the dc potential, the latter is controlled by applying a high bias to the plasma electrode of the extraction system. This leads to discharge maintenance by both rf and dc power deposition and, respectively, to similarities with the axial profile of the dc potential in the glow discharges. The discharge length, the applied rf power, and the bias to the plasma electrode and its radius are the parameters varied in determination of proper conditions for the ion extraction.
针对负离子矩阵源的单个元件（配备有提取系统的平面线圈感应驱动小半径放电装置）进行了离子提取方面的研究。由于负离子的空间分布遵循直流电势的分布，因此通过向提取系统的等离子体电极施加高偏压来控制后者。这导致通过射频和直流功率沉积来维持放电，并且分别与辉光放电中直流电势的轴向分布相似。在确定离子提取的合适条件时，放电长度、施加的射频功率、对等离子体电极的偏压及其半径是变化的参数。
