Tarnev Kh, Demerdjiev A, Shivarova A, Lishev St
Department of Applied Physics, Technical University-Sofia, BG-1000 Sofia, Bulgaria.
Faculty of Physics, Sofia University, BG-1164 Sofia, Bulgaria.
Rev Sci Instrum. 2016 Feb;87(2):02B123. doi: 10.1063/1.4934636.
The paper is in the scope of studies on the rf driving of a matrix source of negative hydrogen ions: a matrix of small radius discharges with planar-coil inductive driving and single aperture extraction from each discharge. The results from a three-dimensional model, in which plasma description is coupled to electrodynamics, confirm former conclusion that a single coil driving of the whole matrix by a zigzag coil with an omega-shaped conductor on the bottom of each discharge tube ensures efficient rf power deposition to the plasma. The latter is due to similarities with the rf driving of a single discharge by a single planar coil, shown by the obtained induced current and spatial distribution of the plasma parameters. Distinctions associated with the coil configuration as a single coil for the whole matrix are also discussed.
一种具有平面线圈感应驱动和各放电单孔引出的小半径放电矩阵。三维模型的结果（其中等离子体描述与电动力学相耦合）证实了先前的结论，即通过在每个放电管底部具有ω形导体的曲折线圈对整个矩阵进行单线圈驱动可确保向等离子体有效沉积射频功率。这是由于与单个平面线圈对单个放电的射频驱动存在相似性，这由所获得的感应电流和等离子体参数的空间分布表明。还讨论了与作为整个矩阵的单个线圈的线圈配置相关的差异。
