Smith Evan M, Panjwani Deep, Ginn James, Warren Andrew P, Long Christopher, Figuieredo Pedro, Smith Christian, Nath Janardan, Perlstein Joshua, Walter Nick, Hirschmugl Carol, Peale Robert E, Shelton David
Appl Opt. 2016 Mar 10;55(8):2071-8. doi: 10.1364/AO.55.002071.
Infrared-absorbing gold black has been selectively patterned onto the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves much of gold black's high absorptance. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers. For our fabricated devices, infrared responsivity is improved 22% in the long-wave IR and 70% in the mid-wave IR by the gold black coating, with no significant change in detector noise, using a 300°C blackbody and 80 Hz chopping rate. The increase in the time constant caused by the additional mass of gold black is ∼15%.
红外吸收性金黑已被选择性地图案化到基于氧化钒的红外测辐射热计阵列的有源表面上。通过金属剥离进行图案化依赖于用蒸发氧化物保护易碎的金黑，这保留了金黑的大部分高吸收率。这种图案化的金黑在用于制造气桥测辐射热计的牺牲聚酰亚胺的干法蚀刻去除过程中也能幸存下来。对于我们制造的器件，使用300°C黑体和80Hz斩波率，通过金黑涂层，长波红外的红外响应率提高了22%，中波红外提高了70%，探测器噪声没有显著变化。由金黑的额外质量引起的时间常数增加约为15%。
