Jeong Jong Seok, Mkhoyan K Andre
Department of Chemical Engineering and Materials Science,University of Minnesota,Minneapolis,MN 55455,USA.
Microsc Microanal. 2016 Jun;22(3):536-43. doi: 10.1017/S1431927616000635. Epub 2016 Mar 28.
Acquiring an atomic-resolution compositional map of crystalline specimens has become routine practice, thus opening possibilities for extracting subatomic information from such maps. A key challenge for achieving subatomic precision is the improvement of signal-to-noise ratio (SNR) of compositional maps. Here, we report a simple and reliable solution for achieving high-SNR energy-dispersive X-ray (EDX) spectroscopy spectrum images for individual atomic columns. The method is based on standard cross-correlation aided by averaging of single-column EDX maps with modifications in the reference image. It produces EDX maps with minimal specimen drift, beam drift, and scan distortions. Step-by-step procedures to determine a self-consistent reference map with a discussion on the reliability, stability, and limitations of the method are presented here.
获取晶体样本的原子分辨率成分图已成为常规操作，从而为从此类图中提取亚原子信息开辟了可能性。实现亚原子精度的一个关键挑战是提高成分图的信噪比（SNR）。在此，我们报告了一种简单可靠的解决方案，用于为单个原子列实现高信噪比的能量色散X射线（EDX）光谱图像。该方法基于标准互相关，并通过对参考图像进行修改来平均单列EDX图。它生成的EDX图具有最小的样本漂移、束流漂移和扫描失真。本文介绍了确定自洽参考图的分步程序，并讨论了该方法的可靠性、稳定性和局限性。
