A system for acquiring simultaneous electron energy-loss and X-ray spectrum-images.

A compositional imaging system based on simultaneous scanning electron energy-loss spectroscopy (EELS) and energy-dispersive X-ray spectroscopy (EDS) was developed. This system utilizes the combined power of EELS and EDS for quantitative compositional imaging at nanometre resolution. The system is particularly suitable for, but not limited to, biological research, as it simultaneously provides sensitive maps of an element such as Ca or P from EELS and of many other elements from EDS. Degradation of resolution by specimen drift is prevented by correcting for drift during data acquisition, using image cross-correlation. Several advanced features are implemented for real-time and/or off-line quantitative analysis, and the performance of the system is illustrated with practical applications to compositional imaging of cardiac muscle.