Wang Y Z, Kong M G, Liu Z W, Lin C C, Zeng Y
The State Key Lab of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China.
Key Laboratory of Materials Physics, Institute of Solid State Physics, Chinese Academy of Science, Hefei, Anhui, China.
J Microsc. 2016 Oct;264(1):34-40. doi: 10.1111/jmi.12413. Epub 2016 Apr 18.
The spatial resolution of transmission electron backscatter diffraction (t-EBSD) with a standard conventional EBSD detector was evaluated quantitatively based on the calculation of the correlation coefficient of transmission patterns which were acquired across a twin boundary in the sample of austenitic steel. The results showed that the resolution of t-EBSD improved from tens of nanometres to below 10 nm with increasing accelerating voltage and thinning of specimen thickness. High voltage could enhance the penetration depth and reduce the scattering angle. And the thinning of specimen thickness would result in decreasing of the scattering events according to the theory of thermal diffuse scattering (TDS). In addition, the transmission patterns were found to be weak and noisy if the specimen was too thin, because of the decreasing intensity detected by the screen. Consequently, in this work, the best spatial resolution of 7 nm was achieved at 30 kV and 41 nm thickness. Moreover, the specimen thickness range was also discussed using Monte-Carlo simulation. This approach was helpful to account for the differences of measured spatial resolutions, by t-EBSD, of lamellas with different thickness.
基于在奥氏体钢样品中跨越孪晶界采集的透射模式相关系数的计算，对配备标准传统电子背散射衍射（EBSD）探测器的透射电子背散射衍射（t-EBSD）的空间分辨率进行了定量评估。结果表明，随着加速电压的增加和样品厚度的减薄，t-EBSD的分辨率从几十纳米提高到了10纳米以下。高电压可以增加穿透深度并减小散射角。根据热漫散射（TDS）理论，样品厚度的减薄会导致散射事件的减少。此外，如果样品太薄，透射模式会显得微弱且有噪声，这是因为屏幕检测到的强度降低了。因此，在这项工作中，在30 kV和41 nm厚度下实现了7 nm的最佳空间分辨率。此外，还使用蒙特卡罗模拟讨论了样品厚度范围。这种方法有助于解释通过t-EBSD测量的不同厚度薄片空间分辨率的差异。
