Kuo Chia-Wei, Kuo Jui-Chao, Wang Sheng-Chang
Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC.
Department of Materials Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC.
Ultramicroscopy. 2018 Oct;193:126-136. doi: 10.1016/j.ultramic.2018.06.019. Epub 2018 Jun 30.
This work aims to investigate the influence of intrinsic and extrinsic factors on the physical resolution of the transmission electron backscattered diffraction technique (t-EBSD) in aluminum and silver. Here, we focus on the intrinsic factors, namely, atomic number and thickness of the specimen, and extrinsic set-up factors, which include the electron beam voltage, working distance, and specimen tilt. The working distance and tilt angle, which are selected as 12 mm and 60° for Al and 12 mm and 50° for Ag, respectively, reveal a sharp pattern with high contrast. The physical resolutions at the lateral and longitudinal directions depend on the depth resolution. The depth and lateral and longitudinal resolutions increase in Al but decrease in Ag with increased accelerating voltage. The decrease in specimen thickness for Al and Ag from 400 nm to 100 nm reduces the lateral and longitudinal resolutions. The most ideal depth and lateral and longitudinal resolutions obtained under a thickness of 100 nm are 22.7, 18.9, and 33.7 nm at 30 kV for Ag and 34.7, 22.8, and 36.6 nm at 15 kV for Al, respectively.
这项工作旨在研究内在和外在因素对铝和银中透射电子背散射衍射技术（t-EBSD）物理分辨率的影响。在这里，我们关注内在因素，即样品的原子序数和厚度，以及外在设置因素，包括电子束电压、工作距离和样品倾斜度。工作距离和倾斜角分别选为铝的12毫米和60°以及银的12毫米和50°时，会呈现出具有高对比度的清晰图案。横向和纵向方向的物理分辨率取决于深度分辨率。随着加速电压的增加，铝中的深度、横向和纵向分辨率增加，而银中的则降低。铝和银的样品厚度从400纳米减小到100纳米会降低横向和纵向分辨率。在100纳米厚度下获得的最理想深度、横向和纵向分辨率，对于银在30千伏时分别为22.7、18.9和33.7纳米，对于铝在15千伏时分别为34.7、22.8和36.6纳米。
