Senf F, Bijkerk F, Eggenstein F, Gwalt G, Huang Q, Kruijs R, Kutz O, Lemke S, Louis E, Mertin M, Packe I, Rudolph I, Schäfers F, Siewert F, Sokolov A, Sturm J M, Waberski Ch, Wang Z, Wolf J, Zeschke T, Erko A
Opt Express. 2016 Jun 13;24(12):13220-30. doi: 10.1364/OE.24.013220.
For photon energies of 1 - 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84° in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range.
对于1 - 5千电子伏特的光子能量，带有多层涂层的闪耀光栅非常适合用于抑制光栅单色仪中的杂散光和高阶光。我们研制并表征了一种涂覆有20周期Cr/C多层膜的2000线/毫米闪耀光栅。多层膜的d间距为7.3纳米，已适配500纳米的线间距和0.84°的闪耀角，以便在1.5千电子伏特至3千电子伏特的光子能量范围内提供最高效率。已测量了多层光栅的效率以及同时涂覆的见证多层膜的反射率。在2千电子伏特时测得效率为35%，在4千电子伏特时实现了55%的最大效率。此外，观察到对高阶光有强烈抑制，这使得闪耀多层光栅也是低X射线能量范围的有利色散元件。
