Cui Junning, He Zhangqiang, Jiu Yuanwei, Tan Jiubin, Sun Tao
Appl Opt. 2016 Sep 1;55(25):7086-92. doi: 10.1364/AO.55.007086.
The demand for minimal cyclic nonlinearity error in laser interferometry is increasing as a result of advanced scientific research projects. Research shows that the quadrature phase error is the main effect that introduces cyclic nonlinearity error, and polarization-mixing cross talk during beam splitting is the main error source that causes the quadrature phase error. In this paper, a new homodyne quadrature laser interferometer configuration based on nonpolarization beam splitting and balanced interference between two circularly polarized laser beams is proposed. Theoretical modeling indicates that the polarization-mixing cross talk is elaborately avoided through nonpolarizing and Wollaston beam splitting, with a minimum number of quadrature phase error sources involved. Experimental results show that the cyclic nonlinearity error of the interferometer is up to 0.6 nm (peak-to-valley value) without any correction and can be further suppressed to 0.2 nm with a simple gain and offset correction method.
由于先进的科研项目，对激光干涉测量中最小循环非线性误差的要求日益提高。研究表明，正交相位误差是引入循环非线性误差的主要因素，而分束过程中的偏振混合串扰是导致正交相位误差的主要误差源。本文提出了一种基于非偏振分束和两束圆偏振激光束之间平衡干涉的新型零差正交激光干涉仪配置。理论建模表明，通过非偏振和沃拉斯顿分束精心避免了偏振混合串扰，涉及的正交相位误差源数量最少。实验结果表明，该干涉仪的循环非线性误差在无任何校正时高达0.6纳米（峰谷值），采用简单的增益和偏移校正方法可进一步抑制至0.2纳米。
