Fesharaki Faezeh, Hossain Nadir, Vigne Sebastien, Chaker Mohamed, Wu Ke
Opt Express. 2016 Sep 5;24(18):21027-37. doi: 10.1364/OE.24.021027.
Periodic structures, acting as reflectors, filters, and couplers, are a fundamental building block section in many optical devices. In this paper, a three-dimensional simulation of a grating coupler, a well-known periodic structure, is conducted. Guided waves and leakage characteristics of an out-of-plane grating coupler are studied in detail, and its coupling efficiency is examined. Furthermore, a numerical calibration analysis is applied through a commercial software package on the basis of a full-wave finite-element method to calculate the complex propagation constant of the structure and to evaluate the radiation pattern. For experimental evaluation, an optimized grating coupler is fabricated using electron-beam lithography technique and plasma etching. An excellent agreement between simulations and measurements is observed, thereby validating the demonstrated method.
周期性结构作为反射器、滤波器和耦合器，是许多光学器件中的基本构建模块部分。本文对一种著名的周期性结构——光栅耦合器进行了三维模拟。详细研究了面外光栅耦合器的导波和泄漏特性，并考察了其耦合效率。此外，基于全波有限元方法，通过商业软件包进行数值校准分析，以计算结构的复传播常数并评估辐射方向图。为了进行实验评估，采用电子束光刻技术和等离子体蚀刻制作了一个优化的光栅耦合器。模拟结果与测量结果之间呈现出极佳的一致性，从而验证了所展示的方法。
