Wang Gang, Wang Jun, Dai Haitao, Liu Changlong
School of Science, Tianjin University, Tianjin 300072, People's Republic of China.
College of Science, China University of Petroleum, Qingdao 266580, People's Republic of China.
Nanotechnology. 2021 May 14;32(31). doi: 10.1088/1361-6528/abfc74.
The Au/SiOnanocomposite grating coupler with a period of 600 nm was fabricated by implantation of 140 keV Au ions at a fluence of 6 × 10ions·cmin combination with subsequent electron-beam lithography and ion beam etching. The thermal evolution of Au nanoparticles and its influence on the vertical coupling efficiency of the prepared grating coupler has been investigated in detail. The results clearly show that the coupling efficiency of the nanocomposite grating coupler could be affected by the thermal evolution of Au nanoparticles, which increases in the annealing temperature range up to 800 °C, and then decreases at 900 °C and above. Theoretical calculation demonstrates that the change of the coupling efficiency should be closely related to the synergistic effect of the scattering effect and the variation in the volume fraction of Au nanoparticles due to the thermal growth.
通过以6×10¹³离子·cm⁻²的注量注入140 keV的金离子，并结合后续的电子束光刻和离子束蚀刻，制备了周期为600 nm的金/氧化硅纳米复合光栅耦合器。详细研究了金纳米颗粒的热演化及其对所制备光栅耦合器垂直耦合效率的影响。结果清楚地表明，纳米复合光栅耦合器的耦合效率会受到金纳米颗粒热演化的影响，在高达800°C的退火温度范围内耦合效率增加，而在900°C及以上则降低。理论计算表明，耦合效率的变化应与散射效应以及由于热生长导致的金纳米颗粒体积分数变化的协同效应密切相关。
