De Backer A, van den Bos K H W, Van den Broek W, Sijbers J, Van Aert S
Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
AG Strukturforschung/Elektronenmikroskopie, Institut für Physik, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany.
Ultramicroscopy. 2016 Dec;171:104-116. doi: 10.1016/j.ultramic.2016.08.018. Epub 2016 Aug 31.
An efficient model-based estimation algorithm is introduced to quantify the atomic column positions and intensities from atomic resolution (scanning) transmission electron microscopy ((S)TEM) images. This algorithm uses the least squares estimator on image segments containing individual columns fully accounting for overlap between neighbouring columns, enabling the analysis of a large field of view. For this algorithm, the accuracy and precision with which measurements for the atomic column positions and scattering cross-sections from annular dark field (ADF) STEM images can be estimated, has been investigated. The highest attainable precision is reached even for low dose images. Furthermore, the advantages of the model-based approach taking into account overlap between neighbouring columns are highlighted. This is done for the estimation of the distance between two neighbouring columns as a function of their distance and for the estimation of the scattering cross-section which is compared to the integrated intensity from a Voronoi cell. To provide end-users this well-established quantification method, a user friendly program, StatSTEM, is developed which is freely available under a GNU public license.
引入了一种基于模型的高效估计算法，用于从原子分辨率（扫描）透射电子显微镜（(S)TEM）图像中量化原子列的位置和强度。该算法在包含单个列的图像片段上使用最小二乘估计器，充分考虑相邻列之间的重叠，从而能够分析大视野。对于该算法，已经研究了从环形暗场（ADF）扫描透射电子显微镜（STEM）图像估计原子列位置和散射截面测量值的准确性和精度。即使对于低剂量图像，也能达到最高可实现的精度。此外，还强调了考虑相邻列之间重叠的基于模型方法的优点。这是针对估计两个相邻列之间的距离作为它们距离的函数以及估计散射截面进行的，该散射截面与来自Voronoi单元的积分强度进行了比较。为了向最终用户提供这种成熟的量化方法，开发了一个用户友好的程序StatSTEM，它在GNU公共许可证下免费提供。
