Lei Zhihong, Chen Yan, Xu Guisheng, Liu Jinfeng, Yuan Maodan, Zeng Lvming, Ji Xuanrong, Wu Dawei
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China.
Key Laboratory of Transparent Opto-Functional Advanced Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China.
Micromachines (Basel). 2020 May 19;11(5):512. doi: 10.3390/mi11050512.
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(MgNb)-%PbTiO3 (PMN-%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN-31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN-31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (~1200 pm/V). Our results are promising for fabricating superior PMN-31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.
在制造用于高频（>20 MHz）超声阵列换能器的超小铅镁铌酸盐-铅钛酸盐（PMN-%PT）时，压电性能的下降仍然是一个紧迫的问题。在此，使用355 nm激光对具有微米级切口和高压电性能的PMN-31%PT进行了微加工。我们研究了切口轮廓与激光参数的函数关系，结果表明，通过优化激光参数，可以获得具有指定轮廓且微裂纹较少的微米级切口。对微加工后的PMN-31%PT的畴形态进行了全面分析，以验证在切口附近保持的优异压电性能。通过测定有效压电系数（~1200 pm/V），还成功证明了微加工后样品具有较高的压电响应。我们的研究结果对于制造优质的PMN-31%PT和其他压电高频（>20 MHz）超声阵列换能器具有重要意义。
