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梯度 Ag-Al 薄膜的组合研究:微观结构、相形成、力学和电学性能。

Combinatorial Study of Gradient Ag-Al Thin Films: Microstructure, Phase Formation, Mechanical and Electrical Properties.

机构信息

Department of Chemistry-Ångström Laboratory, Uppsala University , PO Box 538, SE-751 21 Uppsala, Sweden.

AGH University of Science and Technology , International Centre of Electron Microscopy for Materials Science and Faculty of Metals Engineering and Industrial Computer Science, Al. A. Mickiewicza 30, 30-059 Kraków, Poland.

出版信息

ACS Appl Mater Interfaces. 2016 Nov 9;8(44):30635-30643. doi: 10.1021/acsami.6b10659. Epub 2016 Oct 31.

Abstract

A combinatorial approach is applied to rapidly deposit and screen Ag-Al thin films to evaluate the mechanical, tribological, and electrical properties as a function of chemical composition. Ag-Al thin films with large continuous composition gradients (6-60 atom % Al) were deposited by a custom-designed combinatorial magnetron sputtering system. X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), scanning and transmission electron microscopy (SEM and TEM), X-ray photoelectron spectroscopy (XPS), nanoindentation, and four-point electrical resistance screening were employed to characterize the chemical composition, structure, and physical properties of the films in a time-efficient way. For low Al contents (<13 atom %), a highly (111)-textured fcc phase was formed. At higher Al contents, a (002)-textured hcp solid solution phase was formed followed by a fcc phase in the most Al-rich regions. No indication of a μ phase was observed. The Ag-Al films with fcc-Ag matrix is prone to adhesive material transfer leading to a high friction coefficient (>1) and adhesive wear, similar to the behavior of pure Ag. In contrast, the hexagonal solid solution phase (from ca. 15 atom %Al) exhibited dramatically reduced friction coefficients (about 15% of that of the fcc phase) and dramatically reduced adhesive wear when tested against the pure Ag counter surface. The increase in contact resistance of the Ag-Al films is limited to only 50% higher than a pure Ag reference sample at the low friction and low wear region (19-27 atom %). This suggests that a hcp Ag-Al alloy can have a potential use in sliding electrical contact applications and in the future will replace pure Ag in specific electromechanical applications.

摘要

采用组合方法快速沉积和筛选 Ag-Al 薄膜,以评估其机械、摩擦学和电学性能,这些性能与化学成分有关。通过定制设计的组合磁控溅射系统沉积具有大连续成分梯度(6-60 原子%Al)的 Ag-Al 薄膜。X 射线衍射(XRD)、能量色散 X 射线光谱(EDX)、扫描和透射电子显微镜(SEM 和 TEM)、X 射线光电子能谱(XPS)、纳米压痕和四点电阻筛选用于以高效的方式对薄膜的化学成分、结构和物理性能进行表征。对于低 Al 含量(<13 原子%),形成高度(111)织构的 fcc 相。在较高的 Al 含量下,形成(002)织构的 hcp 固溶体相,然后在最富 Al 的区域形成 fcc 相。未观察到μ相的迹象。具有 fcc-Ag 基体的 Ag-Al 薄膜容易发生粘着材料转移,导致高摩擦系数(>1)和粘着磨损,类似于纯 Ag 的行为。相比之下,六方固溶体相(约 15 原子%Al)在与纯 Ag 对磨表面摩擦时表现出显著降低的摩擦系数(约为 fcc 相的 15%)和显著降低的粘着磨损。Ag-Al 薄膜的接触电阻增加仅限制在低摩擦和低磨损区域(19-27 原子%)比纯 Ag 参考样品高 50%。这表明 hcp Ag-Al 合金在滑动电接触应用中具有潜在用途,并将在未来在某些机电应用中替代纯 Ag。

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