Hong Chunfu, He Ping, Tian Jun, Chang Fa, Wu Jianbo, Zhang Pingshan, Dai Pinqiang
Fujian Provincial Key Laboratory of Advanced Materials Processing and Application, Fujian University of Technology, 3 Xueyuan Road, University Town, Fuzhou City, Fujian 350118, China.
School of pharmaceutical chemical and material engineering, Taizhou University, 1139 Shifu Road, Taizhou City, Zhejiang 318000, China.
Materials (Basel). 2020 Mar 13;13(6):1316. doi: 10.3390/ma13061316.
CrN/Ag multilayer coatings and a comparative CrN single layer were deposited via reactive magnetron sputtering. In multilayer coatings, the thickness of each CrN layer was constant at 60 nm, while that of the Ag layer was adjusted from 3 to 10 nm. Microstructure of the films was characterized by X-ray diffraction and transmission electron spectroscopy. The results suggest that the film containing 3 nm of Ag layer presents a nanocomposite structure comprising fine nano-grains and quasi-amorphous clusters. With Ag layer thickness reaching 4.5 nm and above, Ag grains coalesce to produce continuous an Ag layer and exhibit (111) preferential crystallization. Hardness of the films was detected by nanoindentation and it reveals that with increasing the Ag layer thickness, the hardness continuously decreases from 30.2 to 11.6 GPa. Wear performance of the films was examined by the ball-on-disk test at 500 °C. The result suggests that the out-diffusion of Ag towards film surface contributes to the friction reduction, while the wear performance of films depends on the thickness of the Ag layer.
通过反应磁控溅射沉积了CrN/Ag多层涂层以及作为对比的CrN单层涂层。在多层涂层中，每个CrN层的厚度恒定为60 nm，而Ag层的厚度从3 nm调整到10 nm。通过X射线衍射和透射电子能谱对薄膜的微观结构进行了表征。结果表明，含有3 nm Ag层的薄膜呈现出由细小纳米晶粒和准非晶团簇组成的纳米复合结构。当Ag层厚度达到4.5 nm及以上时，Ag晶粒合并形成连续的Ag层，并呈现出(111)择优结晶。通过纳米压痕检测薄膜的硬度，结果表明，随着Ag层厚度的增加，硬度从30.2 GPa持续降低至11.6 GPa。在500℃下通过球盘试验考察了薄膜的耐磨性能。结果表明，Ag向薄膜表面的外扩散有助于降低摩擦，而薄膜的耐磨性能取决于Ag层的厚度。
