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在低玻璃化转变温度的柔性塑料衬底上采用低能量光子烧结技术,打印出具有强附着力的高导电性 Cu 薄膜。

Printed highly conductive Cu films with strong adhesion enabled by low-energy photonic sintering on low-Tg flexible plastic substrate.

机构信息

Printable Electronics Research Centre, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, People's Republic of China.

出版信息

Nanotechnology. 2017 Jan 20;28(3):035203. doi: 10.1088/1361-6528/28/3/035203. Epub 2016 Dec 12.

Abstract

Copper (Cu) films and circuits were fabricated by screen-printing Cu nanoink on low-Tg (glass transition temperature) flexible plastic substrates (PEN and PET) instead of widely used high-Tg polyimide (PI) substrate. Photonic sintering of printed Cu films was carried out using intensive pulsed light (IPL). Low resistivities of 28 μΩ · cm on PEN and 44 μΩ · cm on PET were obtained without damaging the substrates. The sintered Cu films exhibited strong adhesion to PEN and PET substrates, with measured adhesion strength of 5B by the ASTM D3359 international standard, whereas the top part of the copper film on the PI substrate was stripped off during the adhesion test. The sintered Cu films also showed excellent stability in harsh conditions and mechanical flexibility in rolling tests. The underlying mechanisms of the high conductivity and strong adhesion on PEN and PET substrates with low-energy IPL sintering were investigated. Simple circuits and radio frequency identification antennas were made by screen-printing Cu nanoink and IPL sintering, demonstrating the technique's feasibility for practical applications.

摘要

采用丝网印刷法在低玻璃化转变温度(Tg)柔性塑料基底(PEN 和 PET)上制备铜(Cu)薄膜和电路,取代了广泛使用的高 Tg 聚酰亚胺(PI)基底。采用强脉冲光(IPL)对印刷的 Cu 薄膜进行光子烧结。在不损坏基底的情况下,在 PEN 上获得了 28 μΩ·cm 的低电阻率,在 PET 上获得了 44 μΩ·cm 的低电阻率。烧结后的 Cu 薄膜与 PEN 和 PET 基底具有很强的附着力,按照 ASTM D3359 国际标准的测量,附着力强度达到 5B,而 PI 基底上铜膜的顶部在附着力测试中剥落。烧结后的 Cu 薄膜在恶劣条件下表现出良好的稳定性和在滚动测试中的机械柔韧性。研究了低能量 IPL 烧结在 PEN 和 PET 基底上获得高导电性和强附着力的潜在机制。通过丝网印刷 Cu 纳米油墨和 IPL 烧结制作了简单的电路和射频识别天线,证明了该技术在实际应用中的可行性。

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