West Bradley M, Stuckelberger Michael, Jeffries April, Gangam Srikanth, Lai Barry, Stripe Benjamin, Maser Jörg, Rose Volker, Vogt Stefan, Bertoni Mariana I
School of Electrical, Computer, and Energy Engineering, Arizona State University, 551 E Tyler Mall, Tempe, AZ 85281, USA.
School for Engineering of Matter, Transport, and Energy, Arizona State University, 551 E Tyler Mall, Tempe, AZ 85281, USA.
J Synchrotron Radiat. 2017 Jan 1;24(Pt 1):288-295. doi: 10.1107/S1600577516015721.
The study of a multilayered and multicomponent system by spatially resolved X-ray fluorescence microscopy poses unique challenges in achieving accurate quantification of elemental distributions. This is particularly true for the quantification of materials with high X-ray attenuation coefficients, depth-dependent composition variations and thickness variations. A widely applicable procedure for use after spectrum fitting and quantification is described. This procedure corrects the elemental distribution from the measured fluorescence signal, taking into account attenuation of the incident beam and generated fluorescence from multiple layers, and accounts for sample thickness variations. Deriving from Beer-Lambert's law, formulae are presented in a general integral form and numerically applicable framework. The procedure is applied using experimental data from a solar cell with a Cu(In,Ga)Se absorber layer, measured at two separate synchrotron beamlines with varied measurement geometries. This example shows the importance of these corrections in real material systems, which can change the interpretation of the measured distributions dramatically.
通过空间分辨X射线荧光显微镜对多层多组分系统进行研究，在实现元素分布的准确定量方面面临着独特的挑战。对于具有高X射线衰减系数、深度依赖的成分变化和厚度变化的材料的定量尤其如此。本文描述了一种在光谱拟合和定量之后广泛适用的程序。该程序从测量的荧光信号校正元素分布，考虑入射光束的衰减和多层产生的荧光，并考虑样品厚度变化。该程序从比尔-朗伯定律推导而来，公式以一般积分形式和数值适用框架呈现。该程序使用来自具有Cu(In,Ga)Se吸收层的太阳能电池的实验数据进行应用，这些数据在两个具有不同测量几何结构的单独同步加速器光束线上测量。这个例子显示了这些校正在实际材料系统中的重要性，这可以极大地改变对测量分布的解释。
