用于MEMS加速度计的可编程低功耗低噪声电容-电压转换器

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers.

作者信息

Royo Guillermo, Sánchez-Azqueta Carlos, Gimeno Cecilia, Aldea Concepción, Celma Santiago

机构信息

Group of Electronic Design-Aragón Institute of Engineering Research, Universidad de Zaragoza, 50009 Zaragoza, Spain.

Institute of Information and Communication Technologies, Electronics and Applied Mathemathics, Université Catholique de Louvain, 1348 Louvain-la-Neuve, Belgium.

出版信息

Sensors (Basel). 2016 Dec 30;17(1):67. doi: 10.3390/s17010067.

DOI:10.3390/s17010067

PMID:28042830

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5298640/

Abstract

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .

摘要

在这项工作中，我们展示了一种基于微机电系统（MEMS）的用于电容式加速度计的电容 - 电压转换器（CVC）。基于全差分跨阻放大器（TIA），它具有34 dB的跨阻增益控制以及超过十倍的可编程带宽，范围从75 kHz至1.2 MHz。该TIA旨在用于低成本、低功耗的电容式传感器应用。它采用标准的0.18 - μm CMOS技术设计，功耗仅为54 μW。在最大跨阻配置下，该TIA在50 kHz时的等效输入噪声为42 fA/Hz，相当于100 μg/Hz。