Department of advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS) , 797 Changwondaero, Sungsan-Gu, Changwon, Gyeongnam 51508, Republic of Korea.
School of Materials Science and Engineering, Pusan National University , 30 Jangjeon-Dong Geumjeong-Gu, Busan 46241, Republic of Korea.
ACS Appl Mater Interfaces. 2017 Feb 1;9(4):3817-3823. doi: 10.1021/acsami.6b14551. Epub 2017 Jan 17.
Here, we report that Nb doping of two-dimensional (2D) MoSe layered nanomaterials is a promising approach to improve their gas sensing performance. In this study, Nb atoms were incorporated into a 2D MoSe host matrix, and the Nb doping concentration could be precisely controlled by varying the number of NbO deposition cycles in the plasma enhanced atomic layer deposition process. At relatively low Nb dopant concentrations, MoSe showed enhanced device durability as well as NO gas response, attributed to its small grains and stabilized grain boundaries. Meanwhile, an increase in the Nb doping concentration deteriorated the NO gas response. This might be attributed to a considerable increase in the number of metallic NbSe regions, which do not respond to gas molecules. This novel method of doping 2D transition metal dichalcogenide-based nanomaterials with metal atoms is a promising approach to improve the performance such as stability and gas response of 2D gas sensors.
在这里，我们报告了在二维（2D）MoSe 层状纳米材料中掺杂 Nb 是提高其气体传感性能的一种很有前途的方法。在这项研究中，Nb 原子被掺入 2D MoSe 主体基质中，并且通过改变等离子体增强原子层沉积过程中 NbO 沉积循环的数量，可以精确控制 Nb 掺杂浓度。在相对较低的 Nb 掺杂浓度下，MoSe 表现出增强的器件耐久性以及对 NO 气体的响应，这归因于其小晶粒和稳定的晶界。同时，随着 Nb 掺杂浓度的增加，NO 气体的响应会恶化。这可能是由于金属 NbSe 区域的数量大量增加，而这些区域对气体分子没有响应。这种用金属原子掺杂二维过渡金属二卤化物基纳米材料的新方法是提高二维气体传感器的性能（如稳定性和气体响应）的一种很有前途的方法。
