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微间距模板印刷液态金属合金。

Ultrafine Pitch Stencil Printing of Liquid Metal Alloys.

机构信息

U.S. Army Research Laboratory , 2800 Powder Mill Road, Adelphi, Maryland 20783, United States.

General Technical Services Inc. at Army Research Laboratory , 2800 Powder Mill Road, Adelphi, Maryland 20783, United States.

出版信息

ACS Appl Mater Interfaces. 2017 Jan 18;9(2):1178-1182. doi: 10.1021/acsami.6b13088. Epub 2017 Jan 9.

DOI:10.1021/acsami.6b13088
PMID:28058840
Abstract

With high conductivity and stretchable for large cross-sections, liquid metals such as galinstan are promising for creating stretchable devices and interconnects. Creating high resolution features in parallel is challenging, with most techniques limited to a hundred micrometers or more. In this work, multilevel electroplated stencils are investigated for printing liquid metals, with galinstan features as small as ten micrometers printed on soft elastomers, a factor of 10 reduction over past liquid metal stencil printing. Capacitors and resistive strain sensors are also demonstrated, showing the potential for creating stretchable conductors and devices.

摘要

具有高导电性和可拉伸性的大横截面,液态金属如镓铟锡合金有望用于制造可拉伸器件和互连。在平行方向上创建高分辨率特征是具有挑战性的,大多数技术仅限于一百微米或更大。在这项工作中,多层电镀模板用于打印液态金属,在软弹性体上打印出小至 10 微米的镓铟锡合金特征,比过去的液态金属模板印刷缩小了 10 倍。还展示了电容器和电阻应变传感器,表明了制造可拉伸导体和器件的潜力。

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