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用于光化学和化学光刻的高功率365纳米紫外发光二极管汞弧灯替代品。

High-Power 365 nm UV LED Mercury Arc Lamp Replacement for Photochemistry and Chemical Photolithography.

作者信息

Hölz K, Lietard J, Somoza M M

机构信息

Institute of Inorganic Chemistry, Faculty of Chemistry, University of Vienna , Althanstraße 14 (UZA II), A-1090 Vienna, Austria.

出版信息

ACS Sustain Chem Eng. 2017 Jan 3;5(1):828-834. doi: 10.1021/acssuschemeng.6b02175. Epub 2016 Oct 25.

DOI:10.1021/acssuschemeng.6b02175
PMID:28066690
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5209756/
Abstract

Ultraviolet light emitting diodes (UV LEDs) have become widespread in chemical research as highly efficient light sources for photochemistry and photopolymerization. However, in more complex experimental setups requiring highly concentrated light and highly spatially resolved patterning of the light, high-pressure mercury arc lamps are still widely used because they emit intense UV light from a compact arc volume that can be efficiently coupled into optical systems. Advances in the deposition and -type doping of gallium nitride have recently permitted the manufacture of UV LEDs capable of replacing mercury arc lamps also in these applications. These UV LEDs exceed the spectral radiance of mercury lamps even at the intense I-line at 365 nm. Here we present the successful exchange of a high-pressure mercury arc lamp for a new generation UV LED as a light source in photolithographic chemistry and its use in the fabrication of high-density DNA microarrays. We show that the improved light radiance and efficiency of these LEDs offer substantial practical, economic and ecological advantages, including faster synthesis, lower hardware costs, very long lifetime, an >85-fold reduction in electricity consumption and the elimination of mercury waste and contamination.

摘要

紫外发光二极管(UV LED)作为光化学和光聚合反应的高效光源,已在化学研究中广泛应用。然而,在需要高浓度光和高度空间分辨光图案的更复杂实验装置中,高压汞弧灯仍被广泛使用,因为它们能从紧凑的弧光体积中发射强烈的紫外光,且可有效耦合到光学系统中。氮化镓沉积和p型掺杂技术的进步,近来已使得制造出在这些应用中也能替代汞弧灯的UV LED成为可能。这些UV LED即使在365nm的强I线处,其光谱辐射度也超过汞灯。在此,我们展示了在光刻化学中成功地将高压汞弧灯替换为新一代UV LED作为光源,并将其用于高密度DNA微阵列的制造。我们表明,这些LED改善后的光辐射度和效率具有显著的实际、经济和生态优势,包括合成速度更快、硬件成本更低、寿命极长、电力消耗降低85倍以上,以及消除汞废物和污染。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8e56b6956c08/sc-2016-02175d_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/13611681a11f/sc-2016-02175d_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8eb80001dddc/sc-2016-02175d_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8d503863b62a/sc-2016-02175d_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8e56b6956c08/sc-2016-02175d_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/13611681a11f/sc-2016-02175d_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8eb80001dddc/sc-2016-02175d_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8d503863b62a/sc-2016-02175d_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eaaa/5209756/8e56b6956c08/sc-2016-02175d_0005.jpg

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