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低压化学气相沉积法中有限氢和流量间隔对单晶连续石墨烯生长的作用。

Role of limited hydrogen and flow interval on the growth of single crystal to continuous graphene by low-pressure chemical vapor deposition.

机构信息

Advanced Carbon Products section, Advanced Materials and Devices Division, CSIR-National Physical Laboratory, New Delhi-110012, India. Academy of Scientific & Innovative Research (AcSIR), CSIR-NPL, New Delhi-110012, India.

出版信息

Nanotechnology. 2017 Feb 17;28(7):075602. doi: 10.1088/1361-6528/aa527e. Epub 2017 Jan 13.

Abstract

A method for defect-free large crystallite graphene growth remains unknown despite much research effort. In this work, we discuss the role of flow duration of H gas for the production of graphene as per requirement and production at a minimum flow rate considering the safety issue of hydrogen utilization. The copper substrate used for growth was treated for different time intervals (0 to 35 min) in H flow prior to growth. Structural and chemical changes occurring in the copper substrate surface were probed by grazing incidence x-ray diffraction and x-ray photoelectron spectroscopy. The results were correlated with the Raman spectroscopy data, which can quantify the quality of graphene. With increasing H flow interval, secondary nucleation sites were observed and growth favored few-layer graphene structures. The surface-adsorbed oxygen molecules and its conversion to an OH terminated surface with increasing hydrogen flow interval was found to be a key factor in enhancing nucleation density. The Stranski-Krastanov type of nucleation was observed for samples grown with different time intervals of H treatment, except 5 min of H flow prior to growth for which the Volmer-Weber type of growth favored monolayer graphene crystallite growth.

摘要

尽管已经进行了大量研究,但仍不清楚如何实现无缺陷大晶粒石墨烯的生长。在这项工作中,我们讨论了根据需要生产石墨烯时 H 气流持续时间的作用,以及考虑到氢气使用的安全问题时以最小流速生产的作用。用于生长的铜衬底在生长前在 H 气流中处理不同的时间间隔(0 至 35 分钟)。通过掠入射 X 射线衍射和 X 射线光电子能谱探测到铜衬底表面发生的结构和化学变化。结果与拉曼光谱数据相关联,拉曼光谱数据可以定量石墨烯的质量。随着 H 气流间隔的增加,观察到了二次成核位点,并且生长有利于少层石墨烯结构。随着氢气流间隔的增加,表面吸附的氧分子及其转化为 OH 终止表面被发现是提高成核密度的关键因素。对于用不同 H 处理时间间隔生长的样品观察到斯特兰斯基-克拉斯坦诺夫型成核,除了生长前 5 分钟的 H 气流,其有利于单层石墨烯晶畴生长的沃默尔-韦伯型成核。

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