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高温下结晶的超长无缝纳米线阵列的多功能传输,可用于高性能柔性器件。

Versatile Transfer of an Ultralong and Seamless Nanowire Array Crystallized at High Temperature for Use in High-Performance Flexible Devices.

机构信息

School of Electrical Engineering, ‡KAIST Institute for NanoCentury, and §Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST) , 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.

出版信息

ACS Nano. 2017 Feb 28;11(2):1520-1529. doi: 10.1021/acsnano.6b06842. Epub 2017 Feb 2.

Abstract

Nanowire (NW) transfer technology has provided promising strategies to realize future flexible materials and electronics. Using this technology, geometrically controlled, high-quality NW arrays can now be obtained easily on various flexible substrates with high throughput. However, it is still challenging to extend this technology to a wide range of high-performance device applications because its limited temperature tolerance precludes the use of high-temperature annealing, which is essential for NW crystallization and functionalization. A pulsed laser technique has been developed to anneal NWs in the presence of a flexible substrate; however, the induced temperature is not high enough to improve the properties of materials such as ceramics and semiconductors. Here, we present a versatile nanotransfer method that is applicable to NWs that require high-temperature annealing. To successfully anneal NWs during their transfer, the developed fabrication method involves sequential removal of a nanoscale sacrificial layer. Using this method, we first produce an ultralong, perfectly aligned polycrystalline barium titanate (BaTiO) NW array that is heat treated at 700 °C on a flexible polyethylene terephthalate (PET) substrate. This high-quality piezoelectric NW array on a flexible substrate is used as a flexible nanogenerator that generates current and voltage 37 and 10 times higher, respectively, than those of a nanogenerator made of noncrystallized BaTiO NWs.

摘要

纳米线(NW)转移技术为实现未来的柔性材料和电子学提供了有前途的策略。使用这项技术,现在可以在各种柔性衬底上轻松获得几何可控、高质量的 NW 阵列,并且具有高的吞吐量。然而,将这项技术扩展到广泛的高性能器件应用仍然具有挑战性,因为其有限的温度容忍度排除了使用高温退火的可能性,而高温退火对于 NW 的结晶和功能化是必不可少的。已经开发出一种使用脉冲激光技术在柔性衬底上对 NW 进行退火的方法;然而,所诱导的温度不够高,无法改善陶瓷和半导体等材料的性能。在这里,我们提出了一种通用的纳米转移方法,适用于需要高温退火的 NW。为了在转移过程中成功地对 NW 进行退火,所开发的制造方法涉及到顺序去除纳米级的牺牲层。使用这种方法,我们首先在柔性聚对苯二甲酸乙二醇酯(PET)衬底上生产出经过 700°C 热处理的超长、完全对齐的多晶钛酸钡(BaTiO)NW 阵列。这种在柔性衬底上的高质量压电 NW 阵列可用作柔性纳米发电机,其产生的电流和电压分别比由非晶化 BaTiO NW 制成的纳米发电机高 37 倍和 10 倍。

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