利用纳米压印光刻技术定义的硅纳米线阵列改进双栅晶体管传感器的传感特性。
Improved sensing characteristics of dual-gate transistor sensor using silicon nanowire arrays defined by nanoimprint lithography.
作者信息
Lim Cheol-Min, Lee In-Kyu, Lee Ki Joong, Oh Young Kyoung, Shin Yong-Beom, Cho Won-Ju
机构信息
Department of Electronic Materials Engineering, Kwangwoon University , Seoul , Republic of Korea.
Hazards Monitoring BioNano Research Center, Korea Research Institute of Bioscience & Biotechnology (KRIBB) , Daejeon , Republic of Korea.
出版信息
Sci Technol Adv Mater. 2017 Jan 6;18(1):17-25. doi: 10.1080/14686996.2016.1253409. eCollection 2017.
This work describes the construction of a sensitive, stable, and label-free sensor based on a dual-gate field-effect transistor (DG FET), in which uniformly distributed and size-controlled silicon nanowire (SiNW) arrays by nanoimprint lithography act as conductor channels. Compared to previous DG FETs with a planar-type silicon channel layer, the constructed SiNW DG FETs exhibited superior electrical properties including a higher capacitive-coupling ratio of 18.0 and a lower off-state leakage current under high-temperature stress. In addition, while the conventional planar single-gate (SG) FET- and planar DG FET-based pH sensors showed the sensitivities of 56.7 mV/pH and 439.3 mV/pH, respectively, the SiNW DG FET-based pH sensors showed not only a higher sensitivity of 984.1 mV/pH, but also a lower drift rate of 0.8% for pH-sensitivity. This demonstrates that the SiNW DG FETs simultaneously achieve high sensitivity and stability, with significant potential for future biosensing applications.
这项工作描述了一种基于双栅场效应晶体管(DG FET)的灵敏、稳定且无标记的传感器的构建,其中通过纳米压印光刻技术制备的均匀分布且尺寸可控的硅纳米线(SiNW)阵列用作导体通道。与先前具有平面型硅通道层的DG FET相比,构建的SiNW DG FET表现出优异的电学性能,包括18.0的更高电容耦合率以及在高温应力下更低的关态漏电流。此外,虽然传统的基于平面单栅(SG)FET和平面DG FET的pH传感器分别显示出56.7 mV/pH和439.3 mV/pH的灵敏度,但基于SiNW DG FET的pH传感器不仅显示出984.1 mV/pH的更高灵敏度,而且pH灵敏度的漂移率更低,为0.8%。这表明SiNW DG FET同时实现了高灵敏度和稳定性,在未来生物传感应用中具有巨大潜力。