Brown Josef, Davis Benjamin F, Maschmann Matthew R
Department of Mechanical & Aerospace Engineering, University of Missouri.
Department of Mechanical & Aerospace Engineering, University of Missouri;
J Vis Exp. 2017 Feb 5(120):55149. doi: 10.3791/55149.
A nanoscale fabrication technique appropriate for milling carbon nanotube (CNT) forests is described. The technique utilizes an environmental scanning electron microscope (ESEM) operating with a low pressure water vapor ambient. In this technique, a portion of the electron beam interacts with the water vapor in the vicinity of the CNT sample, dissociating the water molecules into hydroxyl radicals and other species by radiolysis. The remainder of the electron beam interacts with the CNT forest sample, making it susceptible to oxidation from the chemical products of radiolysis. This technique may be used to trim a selected region of an individual CNT, or it may be used to remove hundreds of cubic microns of material by adjusting ESEM parameters. The machining resolution is similar to the imaging resolution of the ESEM itself. The technique produces only small quantities of carbon residue along the boundaries of the cutting zone, with minimal effect on the native structural morphology of the CNT forest.
描述了一种适用于铣削碳纳米管（CNT）森林的纳米级制造技术。该技术利用在低压水蒸气环境下运行的环境扫描电子显微镜（ESEM）。在这种技术中，一部分电子束与CNT样品附近的水蒸气相互作用，通过辐射分解将水分子分解为羟基自由基和其他物质。其余的电子束与CNT森林样品相互作用，使其易于受到辐射分解化学产物的氧化作用。该技术可用于修剪单个CNT的选定区域，或者通过调整ESEM参数用于去除数百立方微米的材料。加工分辨率与ESEM本身的成像分辨率相似。该技术仅在切割区域的边界产生少量的碳残留物，对CNT森林的原生结构形态影响最小。
