Ma Haili, Feng Jie, Lv Hangbing, Gao Tian, Xu Xiaoxin, Luo Qing, Gong Tiancheng, Yuan Peng
Department of Micro/Nano Electronics, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education, Shanghai Jiao Tong University, Shanghai, China.
Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China.
Nanoscale Res Lett. 2017 Dec;12(1):118. doi: 10.1186/s11671-017-1905-3. Epub 2017 Feb 15.
In this study, we present a bilayer resistive switching memory device with Pt/TaO/HfO /Hf structure, which shows sub-1 μA ultralow operating current, median switching voltage, adequate ON/OFF ratio, and simultaneously containing excellent self-rectifying characteristics. The control sample with single HfO structure shows bidirectional memory switching properties with symmetrical I-V curve in low resistance state. After introducing a 28-nm-thick TaO layer on HfO layer, self-rectifying phenomena appeared, with a maximum self-rectifying ratio (RR) of ~4 × 10 observed at ±0.5 V. Apart from being a series resistance for the cell, the TaO rectifying layer also served as an oxygen reservoir which remains intact during the whole switching cycle.
在本研究中,我们展示了一种具有Pt/TaO/HfO/Hf结构的双层电阻式开关存储器件,该器件表现出亚1 μA的超低工作电流、中等开关电压、足够的开/关比,并且同时具有优异的自整流特性。具有单一HfO结构的对照样品在低电阻状态下呈现出具有对称I-V曲线的双向存储开关特性。在HfO层上引入28 nm厚的TaO层后,出现了自整流现象,在±0.5 V时观察到的最大自整流比(RR)约为4×10。除了作为单元的串联电阻外,TaO整流层还充当了氧储存器,在整个开关周期中保持完整。