Department of Materials Science and Engineering and ‡School of Mechanical Engineering, Yonsei University Yonsei-ro 50, Seodaemun-gu, Seoul 03722, Republic of Korea.
ACS Appl Mater Interfaces. 2017 Mar 22;9(11):10128-10135. doi: 10.1021/acsami.7b00398. Epub 2017 Mar 13.
The development of pressure sensors that are effective over a broad range of pressures is crucial for the future development of electronic skin applicable to the detection of a wide pressure range from acoustic wave to dynamic human motion. Here, we present flexible capacitive pressure sensors that incorporate micropatterned pyramidal ionic gels to enable ultrasensitive pressure detection. Our devices show superior pressure-sensing performance, with a broad sensing range from a few pascals up to 50 kPa, with fast response times of <20 ms and a low operating voltage of 0.25 V. Since high-dielectric-constant ionic gels were employed as constituent sensing materials, an unprecedented sensitivity of 41 kPa in the low-pressure regime of <400 Pa could be realized in the context of a metal-insulator-metal platform. This broad-range capacitive pressure sensor allows for the efficient detection of pressure from a variety of sources, including sound waves, a lightweight object, jugular venous pulses, radial artery pulses, and human finger touch. This platform offers a simple, robust approach to low-cost, scalable device design, enabling practical applications of electronic skin.
开发能够在广泛压力范围内有效工作的压力传感器对于未来可用于检测从声波到动态人体运动等广泛压力范围的电子皮肤的发展至关重要。在这里，我们提出了一种灵活的电容式压力传感器，该传感器采用微图案化的金字塔形离子凝胶，实现超灵敏的压力检测。我们的设备具有出色的压力传感性能，其传感范围从几帕斯卡到 50kPa 都很宽，响应时间快于 20ms，工作电压低至 0.25V。由于采用了高介电常数的离子凝胶作为组成传感材料，因此在金属-绝缘体-金属平台的背景下，在<400Pa 的低压范围内可以实现前所未有的 41kPa 的灵敏度。这种宽范围的电容式压力传感器能够高效地检测来自各种来源的压力，包括声波、轻量级物体、颈静脉脉冲、桡动脉脉冲和人体手指触摸。该平台提供了一种简单、稳健的低成本、可扩展设备设计方法，为电子皮肤的实际应用铺平了道路。
