Additive Manufacturing Research Institute, College of Mechatronics and Control Engineering , Shenzhen University , Shenzhen 518060 , China.
Institute of Applied Physics and Materials Engineering , University of Macau , Avenida da Universidade , Taipa , Macau 999078 , China.
ACS Appl Mater Interfaces. 2018 Apr 18;10(15):12816-12823. doi: 10.1021/acsami.8b01050. Epub 2018 Apr 5.
Flexible pressure sensors are of great importance to be applied in artificial intelligence and wearable electronics. However, assembling a simple structure, high-performance capacitive pressure sensor, especially for monitoring the flow of liquids, is still a big challenge. Here, on the basis of a sandwich-like structure, we propose a facile capacitive pressure sensor optimized by a flexible, low-cost nylon netting, showing many merits including a high response sensitivity (0.33 kPa) in a low-pressure regime (<1 kPa), an ultralow detection limit as 3.3 Pa, excellent working stability after more than 1000 cycles, and synchronous monitoring for human pulses and clicks. More important, this sensor exhibits an ultrafast response speed (<20 ms), which enables its detection for the fast variations of a small applied pressure from the morphological changing processes of a droplet falling onto the sensor. Furthermore, a capacitive pressure sensor array is fabricated for demonstrating the ability to spatial pressure distribution. Our developed pressure sensors show great prospects in practical applications such as health monitoring, flexible tactile devices, and motion detection.
柔性压力传感器在人工智能和可穿戴电子领域具有重要意义。然而，组装一个简单结构、高性能的电容式压力传感器，特别是用于监测液体流动的传感器，仍然是一个巨大的挑战。在这里，我们基于三明治结构，提出了一种通过柔性、低成本的尼龙网优化的简易电容式压力传感器，具有许多优点，包括在低压区（<1kPa）下高响应灵敏度（0.33kPa）、超低检测限低至 3.3Pa、超过 1000 次循环后的出色工作稳定性，以及对人体脉搏和点击的同步监测。更重要的是，该传感器具有超快速的响应速度（<20ms），使其能够检测到小压力施加时的快速变化，这得益于传感器上液滴形态变化过程。此外，我们还制作了一个电容式压力传感器阵列，用于演示对空间压力分布的检测能力。我们开发的压力传感器在健康监测、柔性触觉设备和运动检测等实际应用中具有广阔的前景。
