Park Ju Eun, Kim Jiung, Cha Myoungsik
Appl Opt. 2017 Mar 1;56(7):1855-1860. doi: 10.1364/AO.56.001855.
We report what we believe is a novel method for measuring the thickness profiles of plane parallel plates by analyzing their Haidinger fringes. When an extended monochromatic source is viewed through a ∼1-mm-thick plate, concentric transmission-type Haidinger fringes can easily be observed. Small variations in the plate thickness result in changes in the radii of the ring fringes. In this study, we scanned 20-mm-diameter fused silica and BK7 plates while tracing a specific ring in each fringe pattern to measure the thickness profiles of the plates, achieving an uncertainty of 2 nm in the measurements of the thickness differences between two locations on each plate.
我们报告了一种我们认为新颖的方法，即通过分析平面平行板的海丁格条纹来测量其厚度分布。当通过一块约1毫米厚的平板观察扩展单色光源时，可以很容易地观察到同心透射型海丁格条纹。平板厚度的微小变化会导致环形条纹半径的改变。在本研究中，我们扫描了直径为20毫米的熔融石英板和BK7板，同时在每个条纹图案中追踪特定的环，以测量平板的厚度分布，在测量每块平板上两个位置之间的厚度差时，测量不确定度达到2纳米。
