Miks Antonin, Novak Jiri, Novak Pavel
Czech Technical University in Prague, Faculty of Civil Engineering, Department of Physics, Thakurova 7, 166 29 Prague, Czech Republic.
Appl Opt. 2010 Jun 10;49(17):3259-64. doi: 10.1364/AO.49.003259.
Noncontact optical metrology based on the chromatic confocal principle is becoming increasingly important for fast and accurate measurements of surface topography, distance, and layer thickness in engineering and industry. These sensors are based on the wavelength dependence of longitudinal chromatic aberration of optical systems, and the distance or thickness of the measured sample is coded into spectral information. We provide a theoretical analysis of a problem of the thickness measurement of transparent samples (glass plane-parallel plates or lenses) with respect to material dispersion. Our work deals with a description and analysis of induced measurement errors in the cases of measurement of the thickness of a plane-parallel plate and the central thickness of a lens. Relations are derived for a quantitative evaluation of these errors and a method is presented for minimizing the influence of these errors on the accuracy of measurement.
基于色差共焦原理的非接触式光学计量学在工程和工业领域中对于快速、准确地测量表面形貌、距离和层厚变得越来越重要。这些传感器基于光学系统纵向色差的波长依赖性，被测样品的距离或厚度被编码到光谱信息中。我们针对材料色散对透明样品（玻璃平行平板或透镜）厚度测量问题进行了理论分析。我们的工作涉及描述和分析平行平板厚度测量以及透镜中心厚度测量情况下的测量误差。推导了用于定量评估这些误差的关系式，并提出了一种方法来最小化这些误差对测量精度的影响。
