Imashuku Susumu, Wagatsuma Kazuaki
Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan.
Rev Sci Instrum. 2017 Feb;88(2):023117. doi: 10.1063/1.4976577.
We report a method of reducing the spot size of an electron beam in a portable pyroelectric electron probe microanalyzer (EPMA) and its application to on-site microanalysis. An electron beam with a spot size of 40 μm full width at half maximum was achieved by preventing the production of an electric field on the side of a needle tip set on the pyroelectric crystal in the EPMA by coating the side of the tip with an insulating material. This spot size was approximately 10 times smaller than that previously reported. We were able to acquire a line scan profile of a thin copper line sputtered on a silicon substrate using the portable pyroelectric EPMA. The width of the sputtered copper evaluated from the line scan profile (120 μm) corresponded to that from a line scan profile obtained by conventional stationary scanning electron microscope-energy dispersive X-ray spectroscopy equipment.
我们报告了一种在便携式热释电电子探针微分析仪（EPMA）中减小电子束光斑尺寸的方法及其在现场微分析中的应用。通过用绝缘材料涂覆设置在EPMA热释电晶体上的针尖侧面，防止在针尖侧面产生电场，从而获得了半高宽为40μm的电子束光斑尺寸。该光斑尺寸比先前报道的约小10倍。我们能够使用便携式热释电EPMA获取溅射在硅基板上的细铜线的线扫描轮廓。从线扫描轮廓评估的溅射铜的宽度（120μm）与通过传统的固定扫描电子显微镜 - 能量色散X射线光谱设备获得的线扫描轮廓的宽度一致。
