Anal Chem. 2011 Nov 15;83(22):8363-5. doi: 10.1021/ac201958d. Epub 2011 Oct 28.
A miniaturized electron probe X-ray microanalyzer (EPMA) with a small chamber including the electron source and the sample stage was realized using a pyroelectric crystal as an electron source. The EPMA we propose is the smallest reported so far. Performance of the EPMA was evaluated by investigating energy of obtained continuous X-rays and lower detection limits of transition metals (titanium, iron, and nickel). End point energy (Duane-Hunt limit) of continuous X-rays of 45 keV was obtained. However, it is expected that the EPMA can analyze characteristic X-rays with energy less than 20 keV. The EPMA was able to measure titanium, iron, and nickel wires whose projected areas were more than 0.03 mm(2).
利用热释电晶体作为电子源，实现了一种包含电子源和样品台的小型电子探针 X 射线微分析仪 (EPMA)。我们提出的 EPMA 是迄今为止报道的最小的 EPMA。通过研究获得的连续 X 射线的能量和过渡金属（钛、铁和镍）的更低检测限来评估 EPMA 的性能。获得了 45keV 的连续 X 射线的端点能量（Duane-Hunt 极限）。然而，预计 EPMA 可以分析能量小于 20keV 的特征 X 射线。EPMA 能够测量其投影面积大于 0.03mm(2) 的钛、铁和镍线。
