School of Physics, University of New South Wales, Sydney, NSW 2052, Australia.
Nanotechnology. 2017 Mar 1;28(13):134005. doi: 10.1088/1361-6528/aa6067. Epub 2017 Mar 3.
GaAs was central to the development of quantum devices but is rarely used for nanowire-based quantum devices with InAs, InSb and SiGe instead taking the leading role. p-type GaAs nanowires offer a path to studying strongly confined 0D and 1D hole systems with strong spin-orbit effects, motivating our development of nanowire transistors featuring Be-doped p-type GaAs nanowires, AuBe alloy contacts and patterned local gate electrodes towards making nanowire-based quantum hole devices. We report on nanowire transistors with traditional substrate back-gates and EBL-defined metal/oxide top-gates produced using GaAs nanowires with three different Be-doping densities and various AuBe contact processing recipes. We show that contact annealing only brings small improvements for the moderately doped devices under conditions of lower anneal temperature and short anneal time. We only obtain good transistor performance for moderate doping, with conduction freezing out at low temperature for lowly doped nanowires and inability to reach a clear off-state under gating for the highly doped nanowires. Our best devices give on-state conductivity 95 nS, off-state conductivity 2 pS, on-off ratio [Formula: see text], and sub-threshold slope 50 mV/dec at [Formula: see text] K. Lastly, we made a device featuring a moderately doped nanowire with annealed contacts and multiple top-gates. Top-gate sweeps show a plateau in the sub-threshold region that is reproducible in separate cool-downs and indicative of possible conductance quantisation highlighting the potential for future quantum device studies in this material system.
砷化镓是量子器件发展的核心,但在基于纳米线的量子器件中,它很少与砷化铟、锑化铟和锗硅一起使用,而是取而代之占据主导地位。p 型砷化镓纳米线为研究具有强自旋轨道效应的强受限 0D 和 1D 空穴系统提供了一条途径,这促使我们开发了具有掺铍 p 型砷化镓纳米线、金铍合金接触和图案化局部栅电极的纳米线晶体管,以制造基于纳米线的量子空穴器件。我们报告了使用具有三种不同掺铍密度的砷化镓纳米线和各种 AuBe 接触处理方案的传统衬底背栅和 EBL 定义的金属/氧化物顶栅的纳米线晶体管。我们表明,对于较低的退火温度和较短的退火时间条件下的中等掺杂器件,接触退火仅带来较小的改进。我们仅在中等掺杂下获得良好的晶体管性能,对于低掺杂纳米线,低温下会出现传导冻结,对于高掺杂纳米线,在栅极下无法达到清晰的关态。我们最好的器件在 [Formula: see text] K 下的导通状态电导率为 95 nS,关断状态电导率为 2 pS,导通-关断比为 [Formula: see text],亚阈值斜率为 50 mV/dec。最后,我们制作了一个具有退火接触和多个顶栅的中等掺杂纳米线的器件。顶栅扫描在亚阈值区域显示出一个平台,该平台在单独的冷却过程中是可重复的,表明可能存在电导量子化,突出了在该材料系统中进行未来量子器件研究的潜力。