Ju Guangxu, Highland Matthew J, Yanguas-Gil Angel, Thompson Carol, Eastman Jeffrey A, Zhou Hua, Brennan Sean M, Stephenson G Brian, Fuoss Paul H
>Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Rev Sci Instrum. 2017 Mar;88(3):035113. doi: 10.1063/1.4978656.
We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.
我们描述了一种利用同步辐射源、光学器件和探测器方面正在进行的革命的仪器，该仪器能够使用相干X射线方法对III族氮化物材料的金属有机气相外延（MOVPE）生长进行原位研究。该系统包括样品和探测器的高分辨率定位，包括全旋转，一个X射线透明的腔室壁，用于在宽角度范围内入射和衍射光束的进入，以及最小的样品热运动，从而提供相干X射线研究所需的亚微米级位置稳定性和再现性。该仪器能够在生长过程中对原子尺度的表面和薄膜结构及动力学进行表面X射线光子相关光谱、微束衍射和相干衍射成像，以提供对MOVPE过程的基本理解。
