Research on a bimorph piezoelectric deformable mirror for adaptive optics in optical telescope.

We have proposed a discrete-layout bimorph piezoelectric deformable mirror (DBPDM) and developed its realistic electromechanical model. Compared with the conventional piezoelectric deformable mirror (CPDM) and the bimorph piezoelectric deformable mirror (BPDM), the DBPDM has both a larger stroke and a higher resonance frequency by integrating the strengths of the CPDM and the BPDM. To verify the advancement, a 21-elements DBPDM is studied in this paper. The results have suggested that the stroke of the DBPDM is larger than 10 microns and its resonance frequency is 53.3 kHz. Furthermore, numerical simulation is conducted on the deformation of the mirror using the realistic electromechanical model, and the dependence of the influence function upon the size of the radius of push pad is analyzed.