基于机械和压电驱动弯曲系统的混合自适应X射线镜的最佳变形程序。

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system.

作者信息

Inoue Takato, Nishioka Yuka, Matsuyama Satoshi, Sonoyama Junki, Akiyama Kazuteru, Nakamori Hiroki, Ichii Yoshio, Sano Yasuhisa, Shi Xianbo, Shu Deming, Wyman Max D, Harder Ross, Kohmura Yoshiki, Yabashi Makina, Assoufid Lahsen, Ishikawa Tetsuya, Yamauchi Kazuto

机构信息

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.

TOYAMA, 3816-1 Kishi, Yamakita-machi, Ashigarakami-gun, Kanagawa 258-0112, Japan.

出版信息

Rev Sci Instrum. 2021 Dec 1;92(12):123706. doi: 10.1063/5.0070465.

DOI:10.1063/5.0070465

PMID:34972426

Abstract

A hybrid deformable x-ray mirror consisting of a mechanical bender and a bimorph deformable mirror has been developed to realize adaptive optical systems, such as zoom condenser optics, for synchrotron-radiation-based x-ray microscopy. In the developed system, both bending mechanisms comprehensively contribute to the formation of the target mirror shape and can narrow the role of piezoelectric actuators, thereby enabling a more stable operation. In this study, the behavior of the bimorph mirror under the clamped condition was investigated, and the sharing of the deformation amount for each bending mechanism was optimized to minimize the amplitude of the voltage distribution of the bimorph mirror.

摘要

一种由机械弯曲器和双压电晶片可变形镜组成的混合可变形X射线镜已被开发出来，用于实现基于同步辐射的X射线显微镜的自适应光学系统，如变焦聚光镜光学系统。在开发的系统中，两种弯曲机制都对目标镜形状的形成有综合贡献，并且可以缩小压电致动器的作用，从而实现更稳定的运行。在本研究中，研究了双压电晶片镜在夹紧条件下的行为，并对每种弯曲机制的变形量分配进行了优化，以最小化双压电晶片镜的电压分布幅度。