用于具有模块化设计的可靠压电叠层变形镜的PZT材料研究

Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design.

作者信息

Toporovsky Vladimir, Samarkin Vadim, Kudryashov Alexis, Galaktionov Ilya, Panich Alexander, Malykhin Anatoliy

机构信息

Sadovsky Institute of Geosphere Dynamics, Russian Academy of Sciences, Leninskiy Pr. 38/1, Moscow 119334, Russia.

Department of Physics, Moscow Polytechnic University, Bolshaya Semenovskaya Str. 38, Moscow 107023, Russia.

出版信息

Micromachines (Basel). 2023 Oct 28;14(11):2004. doi: 10.3390/mi14112004.

DOI:10.3390/mi14112004

PMID:38004862

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10673196/

Abstract

This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d, d, d), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tgδ). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material-piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1-4.3 microns and the capacitance of the actuator is about 12 nF.

摘要

本文介绍了一种用于自适应光学的压电陶瓷材料的电物理特性研究。对于制造压电可变形镜可能重要的关键特性如下：压电常数（d、d、d）、电容、不同晶体方向的弹性柔顺值s以及介电损耗正切（tgδ）。基于PZT陶瓷，开发了具有高介电常数、压电模量和机电耦合系数值的PKP-12材料。可变形镜控制元件由所得材料制成——一排带有五个独立致动器的压电陶瓷梳。在这种情况下，致动器的行程在4.1 - 4.3微米范围内，致动器的电容约为12 nF。