Kallmann Ulrich, Lootze Michael, Mescheder Ulrich
Department of Business Admin & Engineering, Furtwangen University of Applied Science, D-78120 Furtwangen, Germany.
Institute for Microsystems Technology (IMST), Department of Mechanical & Medical Engineering, Furtwangen University of Applied Science, D-78120 Furtwangen, Germany.
Micromachines (Basel). 2021 Feb 5;12(2):156. doi: 10.3390/mi12020156.
Adaptive optical (AO) components play an important role in numerous optical applications, from astronomical telescopes to microscope imaging systems. For most of these AO components, the induced wavefront correction, respectively added optical power, is based on a rotationally symmetric or segmented design of the AO component. In this work, we report on the design, fabrication, and characterization of a micro-electronic-mechanical system (MEMS) adaptive membrane mirror in the shape of a parabolic cylinder. In order to interpret the experimental characterization results correctly and provide a tool for future application development, this is accompanied by the setup of an optical simulation model. The characterization results showed a parabolically deformable membrane mirror with an aperture of 8 × 2 mm and an adaptive range for the optical power from 0.3 to 6.1 m (dpt). The optical simulation model, using the Gaussian beamlet propagation method, was successfully validated by laser beam profile measurements taken in the optical characterization setup. This MEMS-based adaptive astigmatic membrane mirror, together with the accompanying simulation model, could be a key component for the rapid development of new optical systems, e.g., adaptive laser line generators.
自适应光学(AO)组件在众多光学应用中发挥着重要作用,从天文望远镜到显微镜成像系统。对于大多数这些AO组件,所诱导的波前校正或分别增加的光焦度,是基于AO组件的旋转对称或分段设计。在这项工作中,我们报告了一种抛物柱面形状的微电子机械系统(MEMS)自适应膜镜的设计、制造和表征。为了正确解释实验表征结果并为未来的应用开发提供工具,我们还建立了一个光学模拟模型。表征结果显示了一个孔径为8×2毫米的抛物面可变形膜镜,其光焦度的自适应范围为0.3至6.1米(屈光度)。使用高斯子束传播方法的光学模拟模型,通过在光学表征装置中进行的激光束轮廓测量得到了成功验证。这种基于MEMS的自适应像散膜镜,连同配套的模拟模型,可能是新型光学系统快速发展的关键组件,例如自适应激光线发生器。