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集成在氮化硅光子平台上的CMOS兼容宽带共传播静态傅里叶变换光谱仪。

CMOS-compatible broadband co-propagative stationary Fourier transform spectrometer integrated on a silicon nitride photonics platform.

作者信息

Nie Xiaomin, Ryckeboer Eva, Roelkens Gunther, Baets Roel

出版信息

Opt Express. 2017 Apr 17;25(8):A409-A418. doi: 10.1364/OE.25.00A409.

Abstract

We demonstrate a novel type of Fourier Transform Spectrometer (FTS) that can be realized with CMOS compatible fabrication techniques. This FTS contains no moving components and is based on the direct detection of the interferogram generated by the interference of the evanescent fields of two co-propagating waveguide modes. The theoretical analysis indicates that this type of FTS inherently has a large bandwidth (>100 nm). The first prototype that is integrated on a SiN waveguide platform is demonstrated and has an extremely small size (0.1 mm). We introduce the operation principle and report on the preliminary experiments. The results show a moderately high resolution (6 nm) which is in good agreement with the theoretical prediction.

摘要

我们展示了一种新型的傅里叶变换光谱仪(FTS),它可以通过与CMOS兼容的制造技术实现。这种FTS没有移动部件,基于对由两个同向传播的波导模式的倏逝场干涉产生的干涉图的直接检测。理论分析表明,这种类型的FTS固有地具有大带宽(>100 nm)。展示了集成在SiN波导平台上的首个原型,其尺寸极小(0.1 mm)。我们介绍了其工作原理并报告了初步实验情况。结果显示出适度高的分辨率(6 nm),这与理论预测高度吻合。

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