El Hakiki Mohamed, Elmazria Omar, Alnot Patrick
IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Mar;54(3):676-81. doi: 10.1109/tuffc.2007.291.
The new layered structure, ZnO/AlN/diamond, for surface acoustic wave (SAW) devices is investigated for gigahertz-band applications. This structure combines the advantages of both piezoelectric materials, with a high electromechanical coupling coefficient (K2) of ZnO and high acoustic velocity of AlN. Theoretical results show that Rayleigh mode SAWs with large phase velocities up to 12,200 m/s and large K2 from 1 to 3% were generated with this new structure.
研究了用于表面声波（SAW）器件的新型分层结构ZnO/AlN/金刚石，用于千兆赫兹频段应用。这种结构结合了两种压电材料的优点，ZnO具有高机电耦合系数（K2），AlN具有高声速。理论结果表明，这种新结构产生了相速度高达12200 m/s且K2在1%至3%之间的瑞利模表面声波。
