State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, Department of Physics, Peking University , Beijing, 100871, China.
Collaborative Innovation Center of Quantum Matter, Beijing, 100871, China.
Nano Lett. 2017 Jun 14;17(6):3563-3569. doi: 10.1021/acs.nanolett.7b00722. Epub 2017 May 5.
In many optoelectronic applications, patterning is required for functional and/or aesthetic purposes. However, established photolithographic technique cannot be applied directly to the hybrid perovskites, which are considered as promising candidates for optoelectronic applications. In this work, a wettability-assisted photolithography (WAP) process, which employs photolithography and one-step solution process to deposit hybrid perovskite, was developed for fabricating patterned hybrid perovskite films. Uniform pinhole-free hybrid perovskite films with sharp-edged micropatterns of any shapes can be constructed through the WAP process. Semitransparent solar cells with an adjustable active layer average visible transmittance of a wide range from 20.0% to 100% and regular solar cells based on patterned CHNHPbI perovskite films were fabricated to demonstrate that the WAP process was compatible with the manufacturing process of optoelectronic devices. With the widely equipped photolithographic facilities in the modern semiconductor industry, we believe the WAP process have a great potential in the industrial production of functionally or aesthetically patterned hybrid perovskite devices.
在许多光电应用中，出于功能和/或美学目的需要对其进行图案化处理。然而，传统的光刻技术不能直接应用于混合钙钛矿，因为它们被认为是光电应用的有前途的候选材料。在这项工作中，我们开发了一种润湿性辅助光刻（WAP）工艺，该工艺采用光刻和一步溶液法来沉积混合钙钛矿，用于制造图案化混合钙钛矿薄膜。通过 WAP 工艺可以构建具有任何形状的边缘锐利的无针孔的均匀混合钙钛矿薄膜。我们制作了具有可调活性层平均可见光透过率范围从 20.0%到 100%的半透明太阳能电池以及基于图案化 CHNHPbI 钙钛矿薄膜的规则太阳能电池，证明了 WAP 工艺与光电设备的制造工艺兼容。由于现代半导体工业中广泛配备的光刻设备，我们相信 WAP 工艺在功能或美学图案化混合钙钛矿器件的工业生产中具有巨大的潜力。
