Zou Chen, Chang Cheng, Sun Di, Böhringer Karl F, Lin Lih Y
Department of Electrical and Computer Engineering, University of Washington, Seattle, Washington 98195, United States.
Nano Lett. 2020 May 13;20(5):3710-3717. doi: 10.1021/acs.nanolett.0c00701. Epub 2020 Apr 27.
Metal halide perovskites are emerging as attractive materials for light-emitting diode (LED) applications. The external quantum efficiency (EQE) has experienced a rapid progress and reached over 21%, comparable to the state of the art organic and quantum dot LEDs. For metal halide perovskites, their simple solution-processing preparation, facile band gap tunability, and narrow emission line width provide another attractive route to harness their superior optoelectronic properties for multicolor display applications. In this work, we demonstrate a high-resolution, large-scale photolithographic method to pattern multicolor perovskite films. This approach is based on a dry lift-off process which involves the use of parylene as an intermediary and the easy mechanical peeling-off of parylene films on various substrates. Using this approach, we successfully fabricated multicolor patterns with red and green perovskite pixels on a single substrate, which could be further applied in liquid crystal displays (LCDs) with blue backlight. Besides, a prototype green perovskite micro-LED display under current driving has been demonstrated.
金属卤化物钙钛矿正成为发光二极管（LED）应用中颇具吸引力的材料。其外量子效率（EQE）取得了快速进展，已超过21%，与最先进的有机和量子点LED相当。对于金属卤化物钙钛矿而言，其简单的溶液处理制备方法、易于调节的带隙以及窄发射线宽，为利用其卓越的光电特性用于多色显示应用提供了另一条有吸引力的途径。在这项工作中，我们展示了一种用于对多色钙钛矿薄膜进行图案化的高分辨率、大规模光刻方法。该方法基于一种干法剥离工艺，该工艺涉及使用聚对二甲苯作为中介，并能轻松地从各种基板上机械剥离聚对二甲苯薄膜。使用这种方法，我们成功地在单个基板上制作了具有红色和绿色钙钛矿像素的多色图案，这些图案可进一步应用于具有蓝色背光的液晶显示器（LCD）中。此外，还展示了一种在电流驱动下的绿色钙钛矿微型LED显示器原型。
