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包括双层薄金属膜的高导电透明灵活电极,用于透明灵活电子学。

Highly Conductive Transparent and Flexible Electrodes Including Double-Stacked Thin Metal Films for Transparent Flexible Electronics.

机构信息

School of Electrical Engineering, The Korea Advanced Institute of Science and Technology , Yuseong-gu, Daejeon 34141, Republic of Korea.

出版信息

ACS Appl Mater Interfaces. 2017 May 17;9(19):16343-16350. doi: 10.1021/acsami.7b04725. Epub 2017 May 2.

Abstract

To keep pace with the era of transparent and deformable electronics, electrode functions should be improved. In this paper, an innovative structure is suggested to overcome the trade-off between optical and electrical properties that commonly arises with transparent electrodes. The structure of double-stacked metal films showed high conductivity (<3 Ω/sq) and high transparency (∼90%) simultaneously. A proper space between two metal films led to high transmittance by an optical phenomenon. The principle of parallel connection allowed the electrode to have high conductivity. In situ fabrication was possible because the only materials composing the electrode were silver and WO, which can be deposited by thermal evaporation. The electrode was flexible enough to withstand 10 000 bending cycles with a 1 mm bending radius. Furthermore, a few μm scale patterning of the electrode was easily implemented by using photolithography, which is widely employed industrially for patterning. Flexible organic light-emitting diodes and a transparent flexible thin-film transistor were successfully fabricated with the proposed electrode. Various practical applications of this electrode to new transparent flexible electronics are expected.

摘要

为了跟上透明和可变形电子产品的时代潮流,电极的功能需要得到改善。在本文中,提出了一种创新结构,以克服透明电极中常见的光学和电学性能之间的权衡。双层金属膜结构同时表现出高导电性(<3 Ω/sq)和高透明度(∼90%)。两个金属膜之间的适当间距通过光学现象导致高透过率。平行连接的原理允许电极具有高导电性。由于电极仅由银和 WO 组成,它们可以通过热蒸发沉积,因此可以进行原位制造。该电极具有足够的柔韧性,可以承受 10000 次弯曲循环,弯曲半径为 1 毫米。此外,通过使用光刻技术可以很容易地实现电极的几微米级图案化,光刻技术在工业上广泛用于图案化。提出的电极成功地制备了柔性有机发光二极管和透明柔性薄膜晶体管。预计这种电极在新的透明柔性电子产品中有多种实际应用。

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