一种谐振式静电微机电系统致动器的非线性参数识别

Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator.

作者信息

Al-Ghamdi Majed S, Alneamy Ayman M, Park Sangtak, Li Beichen, Khater Mahmoud E, Abdel-Rahman Eihab M, Heppler Glenn R, Yavuz Mustafa

机构信息

Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada.

Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada.

出版信息

Sensors (Basel). 2017 May 13;17(5):1121. doi: 10.3390/s17051121.

DOI:10.3390/s17051121

PMID:28505097

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5470797/

Abstract

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

摘要

我们通过实验研究了直接激励下静电微机电系统（MEMS）致动器的二阶主超谐波和二分之一阶次谐波共振。我们确定了表示该致动器的单自由度（1-DOF）广义杜芬振荡器模型的参数。实验在软真空环境中进行，以减少挤压薄膜阻尼，并使用激光测振仪光学测量致动器的响应。结果发现，识别出的模型预测与实验结果高度吻合。我们还确定了过程噪声（驱动电压）的噪声谱密度和测量噪声。