Center for Programmable Materials, School of Materials Science and Engineering, Nanyang Technological University , 50 Nanyang Avenue, Singapore 639798.
ACS Nano. 2017 May 23;11(5):4381-4386. doi: 10.1021/acsnano.7b03143.
Scalability is the major challenge for scanning probe lithography (SPL). Recently developed cantilever-free scanning probe technologies provide a solution to the issue of scalability by incorporating massive arrays of polymer pens, which fundamentally overcome the low-throughput nature of SPL. The further development of cantilever-free SPL brings up a variety of applications in electronics, biology, and chemical synthesis. In this Perspective, we highlight the space-confined synthesis of complex nanostructures enabled by different types of cantilever-free SPL technologies.
可扩展性是扫描探针光刻(SPL)的主要挑战。最近开发的无悬臂扫描探针技术通过结合大量的聚合物笔阵列提供了一种可扩展性的解决方案,从根本上克服了 SPL 的低吞吐量性质。无悬臂 SPL 的进一步发展带来了电子、生物和化学合成等多种应用。在这篇观点文章中,我们强调了不同类型的无悬臂 SPL 技术实现的复杂纳米结构的空间受限合成。