Department of Electrical and Computer Engineering, University of Alberta, 9211-116 St, Edmonton, Alberta, T6G 1H9, Canada.
Nanotechnology. 2017 Sep 15;28(37):374001. doi: 10.1088/1361-6528/aa7d9d. Epub 2017 Jul 4.
Nanofabricated optically anisotropic uniaxial thin films with deep submicron feature sizes are emerging as potential platforms for low-loss all-dielectric metamaterials, and for Dyakonov surface wave-based subwavelength optical confinement and guiding at interfaces with isotropic media. In this context, we investigate the optical properties of one such uniaxial platform, namely self-organized titania nanotube arrays (TNTAs) grown by the bottom-up nanofabrication process of electrochemical anodization on silicon wafer substrates, and subsequently annealed at different temperatures, i.e. 500 °C and 750 °C. We performed detailed quantitative analysis of the structure of the TNTAs using x-ray diffraction and Raman spectroscopy, which revealed a measurable phonon confinement in TNTAs annealed at 500 °C. Variable angle spectroscopic ellipsometry was used to investigate the optical anisotropy in two kinds of TNTAs-those constituted by anatase-phase and those containing a mixture of anatase and rutile phases. Both kinds of TNTAs were found to have positive birefringence (Δn) exceeding 0.06 in the spectral region of interest while mixed phase TNTAs exhibited Δn as high as 0.15. The experimentally measured anisotropy in the refractive index of the TNTAs was compared with the predictions of two different effective medium approximations incorporating the uniaxial geometry. The measured value of Δn for TNTAs exceeded that of bulk anatase single crystals, indicating the potential of nanostructured dielectrics to outperform dielectric crystals of the same material with respect to the magnitude of the achievable directional refractive index contrast.
具有深亚微米特征尺寸的纳米制造各向异性单轴薄膜作为低损耗全电介质超材料的潜在平台,以及基于 Dyakonov 表面波的各向同性介质界面的亚波长光学限制和引导,正在出现。在这种情况下,我们研究了这种各向异性平台之一的光学特性,即通过在硅晶片衬底上进行电化学阳极氧化的自下而上的纳米制造工艺生长的二氧化钛纳米管阵列(TNTAs),并随后在不同温度下进行退火,即 500°C 和 750°C。我们使用 X 射线衍射和拉曼光谱对 TNTAs 的结构进行了详细的定量分析,结果表明在 500°C 下退火的 TNTAs 中存在可测量的声子限制。变角光谱椭圆偏振法用于研究两种 TNTAs 的各向异性,一种是由锐钛矿相组成的,另一种是含有锐钛矿和金红石相混合物的。两种 TNTAs 在感兴趣的光谱区域都表现出正双折射(Δn)超过 0.06,而混合相 TNTAs 则表现出高达 0.15 的Δn。TNTAs 的折射率各向异性的实验测量值与两种不同的有效介质近似值进行了比较,这些近似值包含了单轴几何形状。TNTAs 的测量Δn 值超过了体相锐钛矿单晶的值,这表明纳米结构电介质在实现可达到的定向折射率对比度方面可能优于相同材料的电介质晶体。